The PolySense team has just published a new article on Sensors and Actuators B Chemical Journal Elsevier (IF 7.7) reporting on a highly sensitive gas sensor based on tunable diode laser absorption spectroscopy (TDLAS) for HF monitoring in GeF₄ matrices. The system employs a distributed feedback diode laser operating at 1.278 μm, targeting the HF first-overtone absorption line, and an optimized White cell having a 345 mm length cavity and providing an effective optical path length of 76 m. The minimum detection limit was determined to be 48 ppb (3σ), highlighting superior sensitivity among near-infrared HF detection approaches. These results highlight the system’s strong potential for high-purity gas analysis and real-time process control in semiconductor environments.
The following link provides access to the article:
http://polysense.poliba.it/wp-content/uploads/2025/11/HFsensor-in-GEF4_2025.pdf
